Ultra-thin Co/Pd multilayers with enhanced high-temperature annealing stability
نویسندگان
چکیده
Understanding the thermal budget of perpendicular materials is crucial for the potential application perpendicular magnetic tunnel junctions. In this paper, we study the effects of high-temperature rapid thermal annealing on the structural and magnetic properties of ultra-thin Co/Pd multilayers deposited at room temperature. It is shown that perpendicular magnetic anisotropy of ultra-thin Co/Pd multilayers improves with increasing annealing temperature up to 425 C. This property of ultra-thin Co/Pd multilayers provides increased thermal budgets for CMOS-integrated magnetic devices. VC 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4791577]
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